论文信息 - Recovery Characteristic of Anomalous Stress Induced Leakage Current of 5.6nm Oxide Films - 字舞流文

Recovery Characteristic of Anomalous Stress Induced Leakage Current of 5.6nm Oxide Films

Tadahiro Ohmi | Rihito Kuroda | Shigetoshi Sugawa | Akinobu Teramoto | Y. Kumagai | T. Inatsuka