论文信息 - Low-K factor of SiO2 layer on Si irradiated by YAG:Nd laser - 字舞流文

Low-K factor of SiO2 layer on Si irradiated by YAG:Nd laser

Enn Mellikov | G. Bakradze | A. Medvid | P. Onufrijevs | F. Muktepāvela | D. Kropman