Mechanical Behavior and Modeling of Initially Stressed Membranes

Modeling of microstructures is one of the most important step in the project. In its early stage the analytical modeling is usually used. The need of use of as fast as possible method is a primary source of errors for each designer. The simple analytical model is commonly used in order to obtain basic performance of the device. However, it is the source of error due to some simplifications. In this paper, the comparison between the analytical model and FEM simulation is presented taking into consideration maximal membrane deflection, membrane form and stress distribution. The initial stress of the membrane has been taken into account as a primary source of mismatch. Finally, the error depending of initial stress has been estimated. All simulations has been performed for small deflection of the membrane.