OPTIMIZATION OF PARAMETRIC YIELD: A TUTORIAL

Yield loss can be characterized as either catastrophic or parametric. Catastrophic yield loss is primarily due to local disturbances, such as spot defects, that occur in a manufacturing process. On the other hand, parametric yield loss is due to global disturbances, such as mask misalignment. In this paper we briefly explore these two different types of yield loss and then review some methods that have been developed to maximize parametric yield.