Investigation of the ablated flux characteristics during pulsed laser ablation deposition of multicomponent oxides

The ablated flux characteristics of PbZr0.52Ti0.48O3 (PZT), La0.5Sr0.5CoO3 (LSC), and MgO ceramic targets have been studied as functions of the ablation time, the ablation energy, and the chamber gas pressure. The time dependence of the ablation rate shows an initial exponential decay, reaching a steady‐state value at longer times. The energy dependence of the ablation rate (in vacuum) reveals a distinct ablation threshold energy for MgO ablation, while for PZT and LSC no ablation threshold is evident. The differences in the ablation characteristics of these materials are explained mainly by differences in their melting points, thermal conductivities, and absorption coefficients. Upon adding O2 gas, a visual change in the color and shape of the PZT ablation plume is evident. The color change indicates a gas phase reaction of the ablated species with the O2 gas, while the shape change implies a change in the angular distribution of the ablated species. We have measured a narrowing of the ablated flux distr...

[1]  D. Fork,et al.  Epitaxial MgO on Si(001) for Y‐Ba‐Cu‐O thin‐film growth by pulsed laser deposition , 1991 .

[2]  Orlando Auciello,et al.  Spectroscopic analysis of electronically excited species in XeCl excimer laser‐induced plasmas from the ablated high‐temperature superconductor YBa2Cu3O7 , 1988 .

[3]  J. Kools,et al.  Incongruent transfer in laser deposition of FeSiGaRu thin films , 1993 .

[4]  V. G. Keramidas,et al.  Effects of crystalline quality and electrode material on fatigue in Pb(Zr,Ti)O3 thin film capacitors , 1993 .

[5]  J. Horwitz,et al.  In situ deposition of epitaxial PbZrxTi(1−x)O3 thin films by pulsed laser deposition , 1991 .

[6]  R. Sauerbrey,et al.  Pulsed ultraviolet laser ablation , 1993 .

[7]  Xindi Wu,et al.  Large‐area, two‐sided superconducting YBa2Cu3O7−x films deposited by pulsed laser deposition , 1991 .

[8]  Jeffrey T. Cheung,et al.  Growth of thin films by laser-induced evaporation , 1988 .

[9]  T. Geballe,et al.  High Tc superconductor‐normal‐superconductor Josephson junctions using CaRuO3 as the metallic barrier , 1993 .

[10]  T. Venkatesan,et al.  Observation of two distinct components during pulsed laser deposition of high Tc superconducting films , 1988 .

[11]  J. Mazumder,et al.  One‐dimensional steady‐state model for damage by vaporization and liquid expulsion due to laser‐material interaction , 1987 .

[12]  Ferroelectric thin films , 1990 .

[13]  Xindi Wu,et al.  Target modification in the excimer laser deposition of YBa2Cu3O7−x thin films , 1991 .

[14]  Donald R. Baer,et al.  Consequences of simultaneous exposure of inorganic solids to excimer laser light and an electron beam , 1990 .

[15]  Heungsoo Kim,et al.  Correlation between target‐substrate distance and oxygen pressure in pulsed laser deposition of YBa2Cu3O7 , 1992 .

[16]  D. Fried,et al.  Electric field enhancement of optical emission from plasma plume generated during ArF excimer photoablation of BaO2, Y2O3, CuO and YBa2Cu3O7 , 1991 .

[17]  D. Fork,et al.  Epitaxial YBa2Cu3O7−δ on GaAs(001) using buffer layers , 1992 .

[18]  Jun Hee Lee,et al.  Fatigue and retention in ferroelectric Y‐Ba‐Cu‐O/Pb‐Zr‐Ti‐O/Y‐Ba‐Cu‐O heterostructures , 1992 .

[19]  R. H. Arendt,et al.  Molten Carbonate Fuel Cell Cathode Materials Study , 1984 .

[20]  D. Geohegan.  Fast intensified‐CCD photography of YBa2Cu3O7−x laser ablation in vacuum and ambient oxygen , 1992 .

[21]  James Hammond Brannon,et al.  Threshold behavior in polyimide photoablation: Single-shot rate measurements and surface-temperature modeling , 1993 .