论文信息 - Characterisation of a-C:H and oxygen-containing Si:C:H films by Raman spectroscopy and XPS - 字舞流文

Characterisation of a-C:H and oxygen-containing Si:C:H films by Raman spectroscopy and XPS

I. Bertóti | A. Tóth | M. Mohai | M. Veres | A. Tóth | S. Tóth | M. Füle | M. Koós | I. Pócsik