Electro-optic waveguides with conjugated polymer films fabricated by the carrier-gas-type organic CVD for chip-scale optical interconnects

In order to realize ultra-small light modulators for chip-scale optical interconnects, high-performance electro-optic (EO) materials are required. Conjugated linear molecular wires are expected as one of the candidates of the EO materials due to high-carrier-mobility characteristics of their π-conjugated systems. We propose waveguides with conjugated polymers fabricated by the carrier-gas-type organic CVD, which enables the selectively aligned growth and the selective growth of polymer wires. Using poly-azomethine (poly-AM) as the conjugated polymer, the selectively aligned growth and the selective growth are demonstrated experimentally. 4-μm-wide waveguides are formed by the selectively aligned growth, and propagation of light beams of 650 nm in wavelength is observed. Characterization of EO effect and other properties of the poly-AM waveguides is under way.

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