Identification of LEIS contributions observed in the ion kinetic energy distributions collected on a cameca IMS‐3f SIMS instrument

Kinetic energy distributions of the secondary ions and scattered ions of O + , Cs + and Ar + (bombardment with primary ions of O-, O 2+, Cs + and Ar + was utilized) were obtained from the elemental surfaces of Mg, Al, Si, Ag and Pb using a modified Cameca IMS-3f magnetic sector mass spectrometer. In addition, the distributions of O + were acquired for O 2+ ion surface bombardment of several standard reference materials (Ti-base alloys of SRM648 and SRM649) and geological samples [pyrrhotite (Fe (1-x) S) and arsenopyrite (FeAsS)]. Distinct features attributable to elastic binary projectile/target backscattering collisions were found to be superimposed in the data. Hence, a full characterization of these kinetic ion energy distributions could be made. As a result it is possible to identify both the secondary ion and scattered ion contributions present in the collected kinetic energy distributions and to perform low-energy primary ion surface scattering (LEIS) experiments combined with in situ secondary ion mass spectrometry (SIMS) analysis, albeit to a reduced sensitivity and resolution compared to those possible on dedicated LEIS instruments.