论文信息 - The effect of modifying grain growth on step coverage, defect densities and stress in Al-Si-Cu thin films - 字舞流文

The effect of modifying grain growth on step coverage, defect densities and stress in Al-Si-Cu thin films

V. C. Kannan | S. Chittipeddi | C. Dziuba | V. Ryan | W. Cochran | W.O. Klemmer | J.W. Buckfeller | M.J. McArdle