Study of the Origin of Bending Induced by Bimetallic Effect on Microcantilever

An analytical model for predicting the deflection and force of a bimaterial cantilever is presented. We introduce the clamping effect characterised by an axial load upon temperature changes. This new approach predicts a non linear thermal dependence of cantilever strain. A profilometry technique was used to measure the thermal strain. Comparison with experimental results is used to verify the model. The concordance of the analytical model presented with experimental measurements is better than 10%..

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