Atomic layer deposition of crystalline SrHfO3 directly on Ge (001) for high-k dielectric applications
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Aiting Jiang | Alexander A. Demkov | John G. Ekerdt | David J. Smith | Sirong Lu | Chengqing Hu | Edward T. Yu | E. Yu | David J. Smith | A. Demkov | Chengqing Hu | J. Ekerdt | Martin D. McDaniel | Thong Q. Ngo | A. Posadas | S. Lu | Agham-Bayan S Posadas | A. Jiang | Sirong Lu | E. Yu
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