论文信息 - A nanoanalytical investigation of elemental distributions in high-k dielectric gate stacks on silicon - 字舞流文

A nanoanalytical investigation of elemental distributions in high-k dielectric gate stacks on silicon

M. Mackenzie | S. Gendt | D. McComb | A. Craven | F. Docherty | C. McGilvery | S. McFadzean

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