论文信息 - Double SiGe:C diffusion barrier channel 40nm CMOS with improved short-channel performances - 字舞流文

Double SiGe:C diffusion barrier channel 40nm CMOS with improved short-channel performances

A. Toffoli | J. Cluzel | J. Hartmann | O. Weber | F. Andrieu | C. Laviron | S. Deleonibus | C. Tabone | T. Ernst | L. Brevard | P. Rivallin | D. Lafond | V. Carron | F. Ducroquet | D. Bouchu | G. Guégan | F. Laugier | P. Holliger