A Nanorobotic System for In Situ Stiffness Measurements on Membranes

In order to characterize the mechanical behavior of fragile resonant microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS), nondestructive measurements are required. In this paper, a cartography of local stiffness variations on a suspended micromembrane is established for the first time, by a tuning-fork-based dynamic force sensor inside a scanning electron microscope (SEM). Experiments are conducted individually on a batch of InP membranes 200 nm thin, using a 9-degree-of-freedom (dof) nanomanipulation system, complemented with virtual reality and automation tools. Results provide stiffness values in the range of a few newton per meter, with variations in a single sample depending on the membrane models.

[1]  Toshio Fukuda,et al.  Auto nanomanipulation system for single cell mechanical property characterization inside an environmental SEM , 2012, 2012 IEEE/RSJ International Conference on Intelligent Robots and Systems.

[2]  Bielefeldt,et al.  Subatomic Features on the Silicon (111)-(7x7) Surface Observed by Atomic Force Microscopy. , 2000, Science.

[3]  Moharam Habibnejad Korayem,et al.  Virtual reality interface for nano-manipulation based on enhanced images , 2012 .

[4]  Xiaojing Zheng,et al.  Effect of surface stress on the stiffness of micro/nanocantilevers: Nanowire elastic modulus measured by nano-scale tensile and vibrational techniques , 2013 .

[5]  Franz J. Giessibl,et al.  HIGH-SPEED FORCE SENSOR FOR FORCE MICROSCOPY AND PROFILOMETRY UTILIZING A QUARTZ TUNING FORK , 1998 .

[6]  Steven W. Shaw,et al.  Nonlinear Dynamics and Its Applications in Micro- and Nanoresonators , 2010 .

[7]  Wei-Cheng Hsu,et al.  Young's Modulus of High Aspect Ratio Si3N4 Nano-thickness Membrane , 2007, 2007 7th IEEE Conference on Nanotechnology (IEEE NANO).

[8]  N. Agraït,et al.  Dynamics of quartz tuning fork force sensors used in scanning probe microscopy , 2009, Nanotechnology.

[9]  I. Sagnes,et al.  Fabrication of ultra-thin InP membranes and their application for high reflective mirrors in tunable vertical-cavity devices , 2004, 16th IPRM. 2004 International Conference on Indium Phosphide and Related Materials, 2004..

[10]  Hui Xie,et al.  Calibration of lateral force measurements in atomic force microscopy with a piezoresistive force sensor. , 2008, The Review of scientific instruments.

[11]  Stéphane Régnier,et al.  A tuning fork based wide range mechanical characterization tool with nanorobotic manipulators inside a scanning electron microscope. , 2011, The Review of scientific instruments.

[12]  Thomas Berthelot,et al.  Substructures high resolution imaging of individual IgG and IgM antibodies with piezoelectric tuning fork atomic force microscopy , 2012 .

[13]  Zhan Yang,et al.  Nano needle with buffering beam for single cell stiffness measurement by nanorobotic manipulators inside ESEM , 2012, 2012 12th IEEE International Conference on Nanotechnology (IEEE-NANO).

[14]  Fumihito Arai,et al.  Pico-Newton order force measurement using a calibrated carbon nanotube probe by electromechanical resonance , 2003, 2003 IEEE International Conference on Robotics and Automation (Cat. No.03CH37422).

[15]  Yunhui Liu,et al.  Modeling of Haptic Sensing of Nanolithography with an Atomic Force Microscope , 2005, Proceedings of the 2005 IEEE International Conference on Robotics and Automation.

[16]  Masaki Takahashi,et al.  Interactive nano manipulator based on an atomic force microscope for scanning electron microscopy , 2011, 2011 International Symposium on Micro-NanoMechatronics and Human Science.

[17]  Yong Zhang,et al.  Robotic pick-place of nanowires for electromechanical characterization , 2012, 2012 IEEE International Conference on Robotics and Automation.

[18]  Yan Liang Zhang,et al.  A Load-Lock-Compatible Nanomanipulation System for Scanning Electron Microscope , 2013, IEEE/ASME Transactions on Mechatronics.

[19]  Aude Bolopion,et al.  Haptic Teleoperation for 3-D Microassembly of Spherical Objects , 2012, IEEE/ASME Transactions on Mechatronics.

[20]  Hui Xie,et al.  Gentle and fast atomic force microscopy with a piezoelectric scanning probe for nanorobotics applications , 2013, Nanotechnology.

[21]  Chi-Jia Tong,et al.  Static and dynamic mechanical properties measurement of micro-nano metal thin film using cantilever beam deflection , 2010, 2010 Symposium on Design Test Integration and Packaging of MEMS/MOEMS (DTIP).