Formation of TiN, TiC and TiCN by metal plasma immersion ion implantation and deposition

[1]  S. Mändl,et al.  Lateral texture evolution during formation of TiN by MePIIID , 2002 .

[2]  S. Mändl,et al.  Lateral homogeneity variation in metal plasma immersion ion implantation and deposition , 2002 .

[3]  L. Xia,et al.  Structural characterization of TiCx films prepared by plasma based ion implantation , 2001 .

[4]  J. Sanz,et al.  Optical and electronic properties of TiCxNy films , 2001 .

[5]  S. Mändl,et al.  Optical characterization of TiN produced by metal-plasma immersion ion implantation , 2001 .

[6]  P. Chu,et al.  Dynamic nitrogen and titanium plasma ion implantation/deposition at different bias voltages , 2001 .

[7]  W. Assmann,et al.  Formation of textured TiN-layers on Si by metal plasma immersion ion implantation and deposition , 2000, 2000 International Conference on Ion Implantation Technology Proceedings. Ion Implantation Technology - 2000 (Cat. No.00EX432).

[8]  S. Mändl,et al.  Plasma immersion ion implantation using titanium and oxygen ions , 2000 .

[9]  H. Ichimura,et al.  The composite and film hardness of TiN coatings prepared by cathodic arc evaporation , 2000 .

[10]  W. Meng,et al.  Temperature dependence of inductively coupled plasma assisted growth of TiN thin films , 1999 .

[11]  K. Zdunek,et al.  Investigation of the influence of chemical composition of Ti(CxN1−x) layer on the stresses value in the multilayer coating TiC/Ti(CxN1−x)/TiN , 1999 .

[12]  A. Perry,et al.  Some effects of ion beam treatments on titanium nitride coatings of commercial quality , 1999 .

[13]  K. Yukimura,et al.  Titanium nitride coating on implanted layer using titanium plasma based ion implantation , 1999 .

[14]  A. T. Santhanam,et al.  State of the art in hard coatings for carbide cutting tools , 1998 .

[15]  A. Anders.  Ion charge state distributions of vacuum arc plasmas: The origin of species , 1997 .

[16]  C. Quaeyhaegens,et al.  State of the art for the industrial use of ceramic PVD coatings , 1995 .

[17]  I. Alexandrou,et al.  In situ spectroscopic ellipsometry to monitor the process of TiNx thin films deposited by reactive sputtering , 1995 .

[18]  I. Brown.  Vacuum Arc Ion Sources , 1994, 1404.0514.

[19]  A. Anders,et al.  Metal plasma immersion ion implantation and deposition using vacuum arc plasma sources , 1994 .

[20]  Kevin S. Jones,et al.  Ion implantation technology , 1993 .

[21]  P. Martin,et al.  Deposition of TiN, TiC, and TiO2 films by filtered arc evaporation , 1991 .

[22]  H. Holleck.  Designing Advanced Coatings for Wear Protection , 1991 .

[23]  E. Meletis.  Wear-corrosion behavior of ion plated thin films , 1989 .

[24]  W. Sproul,et al.  High rate reactively sputtered TiN coatings on high speed steel drills , 1985 .

[25]  J. Thornton.  High Rate Thick Film Growth , 1977 .

[26]  L. Toth.  Transition Metal Carbides and Nitrides , 1971 .