论文信息 - Characterization of epitaxially grown films of vanadium oxides

Characterization of epitaxially grown films of vanadium oxides

The growth of VO2 and V2O3 thin films by reactive sputtering has been investigated. Previously reported studies of such thin films have often presented ambiguous results concerning the precise nature of the layers produced. A thorough and comprehensive characterization program including x‐ray diffraction, scanning electron microscopy, Rutherford‐backscattering spectroscopy, and electrical conductivity measurements has been undertaken to ensure that the films produced were of a true epitaxial nature.

[1] K. Rogers. TEXCAM – an interpretation aid for cylindrical texture camera X-ray diffraction patterns , 1990 .

[2] P. J. Hood,et al. Formation and characterization of grain-oriented VO2 thin films , 1989 .

[3] F. Case. Crystallographic transition in conventional bronze and anomalous blue VO(2) thin films. , 1989, Applied optics.

[4] E. E. Chain. Characterization of vanadium oxide optical thin films by x-ray diffractometry. , 1989, Applied optics.

[5] Lawrence R. Doolittle,et al. Algorithms for the rapid simulation of Rutherford backscattering spectra , 1985 .

[6] C. A. Wallace,et al. An X‐ray cylindrical texture camera for the examination of thin films , 1975 .

[7] M. Marezio,et al. Crystal Structure of the Low-Temperature Antiferromagnetic Phase of V 2 O 3 , 1970 .

[8] D. H. Hensler,et al. Structural and Electrical Properties of Vanadium Dioxide Thin Films , 1968 .

[9] T. Mitsuishi. On the Phase Transformation of VO2 , 1967 .

[10] D. Hensler,et al. REACTIVELY SPUTTERED VANADIUM DIOXIDE THIN FILMS , 1967 .

[11] C. H. Griffiths,et al. Transport and Structural Properties of VO2 Films , 1972 .

[12] G. Andersson. STUDIES ON VANADIUM OXIDES. I. PHASE ANALYSIS , 1954 .