PMMA-enhancement of the lateral growth of transfer-free in situ CCVD grown graphene

In this paper we demonstrate the enhancement of the lateral growth of in situ grown catalytic CVD graphene [1] by the introduction of an additional solid carbon source. The fabricated field effect devices show few-layer graphene behavior with an Ion/Ioff ≈ 5, up to a nominal channel length Lnom = 10 μm. The prolonged growth of graphene enables the direct growth of larger devices. Furthermore sheet resistivity measurements using a modified greek cross structure are reported, extracting a sheet resistivity of PMMA-enhanced in situ grown graphene of Rs ≈ 58 kΩ.

[1]  Karsten Beckmann,et al.  Silicon-CMOS Compatible In-situ CCVD Grown Graphene Transistors with Ultra-high On/Off-Current Ratio , 2012 .

[2]  H. P. Boehm,et al.  NOMENCLATURE AND TERMINOLOGY OF GRAPHITE INTERCALATION COMPOUNDS , 1986 .

[3]  C. Keast,et al.  Epitaxial Graphene Transistors on SiC Substrates , 2008, IEEE Transactions on Electron Devices.

[4]  Mikael Östling,et al.  Residual metallic contamination of transferred chemical vapor deposited graphene. , 2015, ACS nano.

[5]  EBERHARD STUMPP,et al.  IUPAC INTERNATIONAL UNION OF PURE AND APPLIED , 2004 .

[6]  Andre K. Geim,et al.  Electric Field Effect in Atomically Thin Carbon Films , 2004, Science.

[7]  R. Murali,et al.  The influence of atmosphere on electrical transport in graphene , 2012 .

[8]  Jong-Hyun Ahn,et al.  Graphenes Converted from Polymers , 2011 .

[9]  K. Novoselov,et al.  A roadmap for graphene , 2012, Nature.

[10]  A.J. Walton,et al.  Sheet resistance measurement of non-standard cleanroom materials using suspended Greek cross test structures , 2006, IEEE Transactions on Semiconductor Manufacturing.

[11]  Kai Yan,et al.  Designed CVD growth of graphene via process engineering. , 2013, Accounts of chemical research.

[12]  W. Kern.  The Evolution of Silicon Wafer Cleaning Technology , 1990 .

[13]  Tomonori Nishimura,et al.  Mobility Variations in Mono- and Multi-Layer Graphene Films , 2009 .

[14]  S. Banerjee,et al.  Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils , 2009, Science.

[15]  Ulrich Hofmann,et al.  Das Adsorptionsverhalten sehr dünner Kohlenstoff‐Folien , 1962 .