A wavelength-selective add-drop switch using silicon microring resonator with a submicron-comb electrostatic actuator.

Electrostatic comb-drive micro actuator with submicron comb fingers was connected to silicon microring resonator to consist a wavelength-selective add-drop switch at 1.5 microm wavelength with variable coupling mechanism. A 500 nm wide 260 nm thick 63.4 microm long silicon microring waveguide was suspended in air with low-loss suspension arms. The air gap between the microring and the input/output waveguides was adjusted by the voltage applied to the comb actuator to vary the coupling efficiency. Transmittance from the input port to a drop port was varied 32.9dB by applying the voltages from 0V to 28.2V. At 28.2V, transmittance from the input port to a through port decreased by 7.83 dB from that at 0V, and 55% of the intensity was transmitted to the drop port. The full-width-half-maximum bandwidth of the dropped light was 0.5 nm, corresponding to a Q-value of 3150.

[1]  Michal Lipson,et al.  High confinement suspended micro-ring resonators in silicon-on-insulator. , 2006, Optics express.

[2]  T. Baba,et al.  Propagation Characteristics of Ultrahigh-Δ Optical Waveguide on Silicon-on-Insulator Substrate , 2001 .

[3]  Yeshaiahu Fainman,et al.  On-chip microfluidic tuning of an optical microring resonator , 2006 .

[4]  Compact gate-all-around silicon light modulator for ultra high speed operation , 2006 .

[5]  M.C. Wu,et al.  Silicon Microtoroidal Resonators With Integrated MEMS Tunable Coupler , 2007, IEEE Journal of Selected Topics in Quantum Electronics.

[6]  Toshihiko Baba,et al.  Low Loss Intersection of Si Photonic Wire Waveguides , 2004 .

[7]  Tzyy-Jiann Wang,et al.  Electro-optically tunable microring resonators on lithium niobate. , 2007, Optics letters.

[8]  M. Paniccia,et al.  A high-speed silicon optical modulator based on a metal–oxide–semiconductor capacitor , 2004, Nature.

[9]  B. Jalali,et al.  Silicon Photonics , 2006, Journal of Lightwave Technology.

[10]  Y. Kokubun,et al.  Coupling efficiency control of vertically coupled microring resonator filter by microactuator , 2006, IEEE Photonics Technology Letters.

[11]  Toshihiko Baba,et al.  Arrayed waveguide grating of 70×60 µm2 size based on Si photonic wire waveguides , 2005 .

[12]  K. Hane,et al.  Submicron silicon waveguide optical switch driven by microelectromechanical actuator , 2008 .

[13]  Cary Gunn,et al.  CMOS Photonics for High-Speed Interconnects , 2006, IEEE Micro.

[14]  Yasuhiko Arakawa,et al.  Si Photonic Wire Waveguide Devices , 2006 .

[15]  S. Chu,et al.  Coupling-loss reduction of a vertically coupled microring resonator filter by spot-size-matched busline waveguides. , 2002, Applied optics.

[16]  William Green,et al.  Hybrid InGaAsP-InP Mach-Zehnder Racetrack Resonator for Thermooptic Switching and Coupling Control. , 2005, Optics express.

[17]  W. Henschel,et al.  Asymmetrically coupled silicon-on-insulator microring resonators for compact add-drop multiplexers , 2003, IEEE Photonics Technology Letters.

[18]  Y. Kokubun,et al.  Fast and stable wavelength-selective switch using double-series coupled dielectric microring resonator , 2006, IEEE Photonics Technology Letters.

[19]  H. Fujita,et al.  Vapor Hydrofluoric Acid Sacrificial Release Technique for Micro Electro Mechanical Systems Using Labware , 2003 .

[20]  D. Van Thourhout,et al.  Compact Wavelength-Selective Functions in Silicon-on-Insulator Photonic Wires , 2006, IEEE Journal of Selected Topics in Quantum Electronics.