论文信息 - Integrated optical ring resonator with micromechanical diaphragms for pressure sensing

Integrated optical ring resonator with micromechanical diaphragms for pressure sensing

An optical pressure sensor has been fabricated which uses an integrated-optical ring resonator to measure the strain induced in a micromachined silicon diaphragm. A silicon substrate is etched from the side opposite the silicon oxynitride optical waveguides to produce a rectangular diaphragm whose long edge lies underneath a straight section in the ring. Pressure-induced changes in the resonant frequency of the ring are measured using a frequency swept laser diode. A linear response to pressure is observed for the TM mode with a sensitivity of 0.0094 rad/kPa. This pressure sensor is rugged, is amenable to batch fabrication, and it provides a link-insensitive readout.<<ETX>>

G. Beheim | G. D. De Brabander | J. Boyd

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