Detection capacitance analysis method for tuning fork micromachined gyroscope based on elastic body model

The detection capacitance analysis method based on the elastic body model for the tuning fork vibratory micromachined gyroscope is first put forward to improve the analytical precision of detection capacitance by employing a dynamic finite element. In this way, the simulation of the microgyroscope performance variance due to its structural variance inevitably introduced by the process of practical micromachining can be achieved. The present method is tested and validated by the numerical calculations and actual experiment. It is shown that the traditional capacitance analysis method based on the rigid body model has some defects due to its simplicity and the present method can provide the foundation for the high precision design of tuning fork vibratory microgyroscope.

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