论文信息 - High-Rate Deposition of Intrinsic a-Si:H and μc-Si:H Layers for Thin‑Film Silicon Solar Cells using a Dynamic Deposition Process - 字舞流文

High-Rate Deposition of Intrinsic a-Si:H and μc-Si:H Layers for Thin‑Film Silicon Solar Cells using a Dynamic Deposition Process

T. Zimmermann | A. Flikweert | T. Merdzhanova | J. Woerdenweber | A. Gordijn | F. Stahr | K. Dybek | J. Bartha