论文信息 - Silicate overcoat layers for the improvement of PECVD SiO2 optofluidic waveguides

Silicate overcoat layers for the improvement of PECVD SiO2 optofluidic waveguides

Silicate spin-on-glass can be used as a protective barrier to coat PECVD SiO2 optofluidic waveguides in order to smooth out surface topology, and lessen moisture absorption on top of the waveguide. The measured optical throughput and mode confinement improved when compared to uncoated waveguides.

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