Demonstration of low voltage and functionally complete logic operations using body-biased complementary and ultra-thin ALN piezoelectric mechanical switches

This paper reports, for the first time, on the demonstration of low voltage and functionally complete logic elements (NAND and NOR) implemented by using body-biased complementary and ultra-thin (250 nm thick) Aluminum Nitride (AlN) based piezoelectric mechanical switches. This work presents, firstly, the importance of scaling AlN films for the demonstration of ultra-thin AlN switches and, secondly, the implementation of a new actuation scheme based on body biasing to lower the switch threshold voltage. Four of these ultra-thin switches were connected together to synthesize functionally complete MEMS logic gates (NAND and NOR) with a ± 2V swing and a body-bias voltage ≪ 8 V.

[1]  C. A. Hall,et al.  VHF high‐power tunable RF bandpass filter using microelectromechanical (MEM) microrelays , 2001 .

[2]  R. Mahameed,et al.  Piezoelectric aluminum nitride nanoelectromechanical actuators , 2009 .

[3]  Gianluca Piazza,et al.  Integration of AlN micromechanical contour-mode technology filters with three-finger dual beam AlN MEMS switches , 2009, 2009 IEEE International Frequency Control Symposium Joint with the 22nd European Frequency and Time forum.

[4]  J. Pulskamp,et al.  Advances in Piezoelectrically Actuated RF MEMS Switches and Phase Shifters , 2007, 2007 IEEE/MTT-S International Microwave Symposium.

[5]  Daniel Judy,et al.  LOW VOLTAGE COMPLEMENTARY MEMS LOGIC USING PIEZOELECTRIC ACTUATORS , 2008 .

[6]  Jae-Hyoung Park,et al.  Design, fabrication and RF performances of two different types of piezoelectrically actuated Ohmic MEMS switches , 2005 .

[7]  Jun Shen,et al.  Latching micromagnetic relays , 2001 .

[8]  M. Pisani,et al.  Dual-Beam Actuation of Piezoelectric AlN RF MEMS Switches Monolithically Integrated with AlN Contour-Mode Resonators , 2008 .

[9]  G. G. Stokes "J." , 1890, The New Yale Book of Quotations.

[10]  P. Zavracky,et al.  Micromechanical switches fabricated using nickel surface micromachining , 1997 .

[11]  N. Sinha,et al.  Body-Biased Complementary Logic Implemented Using AlN Piezoelectric MEMS Switches , 2009, Journal of Microelectromechanical Systems.

[12]  Hyun-Ho Yang,et al.  Maneuvering Pull-in Voltage of an Electrostatic Micro-switch by Introducing a Pre-charged Electrode , 2007, 2007 IEEE International Electron Devices Meeting.

[13]  R. Drangmeister,et al.  MEMs microswitch arrays for reconfigurable distributed microwave components , 2000 .

[14]  Gabriel M. Rebeiz RF MEMS: Theory, Design and Technology , 2003 .