Baffle cooling device
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The invention discloses a baffle cooling device which comprises a connecting base, a connecting member, a cooling cavity, a cooling pipe, an output pipe, an input interface and an output interface. A baffle is connected fixedly with a rotating shaft through the connecting base; the end part of the rotating shaft, which is positioned outside a vacuum cavity, is sleeved with the connecting member; the connecting member is pivoted with the rotating shaft and fixedly connected with the input interface; the input interface is connected with the output interface fixedly; the rotating cavity, the connecting member, the input interface and the output interface are all provided with hollow structures along the axial direction of the rotating shaft, and the hollow structures are communicated with each other to form the cooling cavity; the output pipe is suspended in the cooling cavity, passes through the rotating shaft, the connecting member, the input piece and the input interface, and is fixedly connected with the output interface; the cooling pipe is laid on the baffle and is provided with an input end communicated with the rotating shaft and an output end connected with the output pipe; and the input interface, the cooling cavity, the cooling pipe, the output pipe and the output interface are communicated to form a cooling medium circulation loop. The baffle cooling device has the advantages of good cooling effect, strong adhesive power, high cleanness and capability of reducing the temperature of the vacuum cavity and improving the formation quality of films.