论文信息 - Fabrication and Characterization of Low-Loss Polymeric Waveguides and Micro-Resonators

Fabrication and Characterization of Low-Loss Polymeric Waveguides and Micro-Resonators

We realize low loss, single-mode polymer waveguides and microrings in SU-8 using E-beam lithography and demonstrate a simple approach for accurately extracting the propagation loss i and the coupling between the waveguide and the microring.

Jacob Scheuer

[1] A. Yariv. Critical coupling and its control in optical waveguide-ring resonator systems , 2002, IEEE Photonics Technology Letters.

[2] N. Peyghambarian,et al. Fabrication and characterization of low-loss optical waveguides using a novel photosensitive polyimide , 2005, Journal of Lightwave Technology.

[3] R. C. Tiberio,et al. Propagation loss measurements in semiconductor microcavity ring and disk resonators , 1998 .

[4] Jae-Wook Kang,et al. Structure-property relationship of fluorinated co-poly(arylene ether sulfide)s and co-poly(arylene ether sulfone)s for low-loss and low-birefringence waveguide devices , 2005 .

[5] B. L. Booth,et al. Low loss channel waveguides in polymers , 1989 .

[6] A. Yeniay,et al. Ultra-low-loss polymer waveguides , 2003, Journal of Lightwave Technology.

[7] A. Neyer,et al. Fabrication of low loss polymer waveguides using injection moulding technology , 1993 .

[8] Jang‐Joo Kim,et al. Low-loss and thermally stable TE-mode selective polymer waveguide using photosensitive fluorinated polyimide , 2002 .