INTEGRATION OF III-V NANOWIRE HETEROSTRUCTURES IN SILICON MICROSYSTEMS

Kristian Molhave, Thomas Martensson, Brent Wacaser, Kjetil Gjerde, Dirch Hjorth Petersen, Chistian Kallesoe, Jan Hales, Andy Horsewell, Peter Boggild, and Lars Samuelson 1 NanoDTU, Dept. of Micro and Nanotechnology, Technical University of Denmark 2 The Nanometer Consortium, Solid State Physics, Lund University, Sweden 3 Department of Production and Management (IPL), Technical. University of Denmark e-mail: krm@mic.dtu.dk