Three Dimensional Assembly in Directed Self-assembly of Block Copolymers

1 Institute for Molecular Engineering, University of Chicago, 5747 South Ellis Ave, Chicago, 60637, United States 2 Materials Science Division, Argonne National Laboratory, 9700 S. Cass Avenue, Argonne, Illinois 60439, United States 3 Tokyo Ohka Kogyo Co., Ltd.1590 Tabata, Samukawa-machi, Koza-gun, Kanagawa-ken 253-0114, Japan 4Center for Nanoscale Materials, Argonne National Laboratory, 9700 S. Cass Avenue, Argonne, Illinois 60439, United States

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