Heterogeneously Integrated InP\/Silicon Photonics: Fabricating Fully Functional Transceivers

Silicon (Si) photonics research and development started more than 30 years ago and has intensified in the last 15 years as levels of device functionality, photonic integration, and commercialization have all increased [1]. The key drivers for using Si in photonics arise from the quality of wafers and the superior processing capabilities developed and funded by the microelectronics industry. It has the promise to revolutionize the photonics industry in the same way that CMOS design and processing revolutionized the microelectronics industry, by driving down photonic chip cost while enabling higher levels of photonic integration and functionality. Commercialization, so far, has focused on optical communication (Telecom [2] and data center [3]) and biosensing [4], with a wealth of future application areas, including high-performance computing [5], automotive (lidar) [6], optical switches [7], and artificial intelligence [8].

[1]  Bernard Aspar,et al.  InP microdisk lasers on silicon wafer: CW room temperature operation at 1.6 [micro sign]m , 2001 .

[2]  J. Bowers,et al.  Electrically pumped hybrid AlGaInAs-silicon evanescent laser. , 2006, Optics express.

[3]  J. Bowers,et al.  Electrically Driven and Thermally Tunable Integrated Optical Isolators for Silicon Photonics , 2016, IEEE Journal of Selected Topics in Quantum Electronics.

[4]  Jens H. Schmid,et al.  Roadmap on silicon photonics , 2016 .

[5]  Di Liang,et al.  Robust hybrid quantum dot laser for integrated silicon photonics. , 2016, Optics express.

[6]  Jie Sun,et al.  Large-Scale Silicon Photonic Circuits for Optical Phased Arrays , 2014, IEEE Journal of Selected Topics in Quantum Electronics.

[7]  David J. Thomson,et al.  Silicon optical modulators , 2010 .

[8]  C. Doerr,et al.  Silicon photonic integration in telecommunications , 2015, Front. Phys..

[9]  Qi Li,et al.  Scaling Silicon Photonic Switch Fabrics for Data Center Interconnection Networks References and Links Programmable Wavelength Locking and Routing in a Silicon-photonic Interconnection Network , 2022 .

[10]  Rachel Won,et al.  Integrating silicon photonics , 2010 .

[11]  Di Liang,et al.  Device and Integration Technology for Silicon Photonic Transmitters , 2011, IEEE Journal of Selected Topics in Quantum Electronics.

[12]  John E. Bowers,et al.  Photonic Integrated Circuits Using Heterogeneous Integration on Silicon , 2018, Proceedings of the IEEE.

[13]  Jerry R. Meyer,et al.  Heterogeneous Integration for Mid-infrared Silicon Photonics , 2017, IEEE Journal of Selected Topics in Quantum Electronics.

[14]  Di Liang,et al.  Recent progress in lasers on silicon , 2010 .

[15]  Qi Li,et al.  Silicon Photonics for Exascale Systems , 2014, Journal of Lightwave Technology.

[16]  Hasitha Jayatilleka,et al.  A 128 Gb/s PAM4 Silicon Microring Modulator , 2018, 2018 Optical Fiber Communications Conference and Exposition (OFC).

[17]  John Bowers,et al.  Hybrid silicon evanescent laser fabricated with a silicon waveguide and III-V offset quantum wells. , 2005, Optics express.

[18]  Dong Pan,et al.  Silicon Photonics Platform for 400G Data Center Applications , 2018, 2018 Optical Fiber Communications Conference and Exposition (OFC).

[19]  John E. Cunningham,et al.  Power-efficient III-V/silicon external cavity DBR lasers. , 2012, Optics express.

[20]  R. Soref,et al.  Electrooptical effects in silicon , 1987 .

[21]  Andreas Beling,et al.  High-Power Photodiodes With 65 GHz Bandwidth Heterogeneously Integrated Onto Silicon-on-Insulator Nano-Waveguides , 2018, IEEE Journal of Selected Topics in Quantum Electronics.

[22]  John E. Bowers,et al.  A 2.5 kHz Linewidth Widely Tunable Laser with Booster SOA Integrated on Silicon , 2018, 2018 IEEE International Semiconductor Laser Conference (ISLC).

[23]  Juthika Basak,et al.  A 4×12.5 Gb/s CWDM Si photonics link using integrated hybrid silicon lasers , 2011, CLEO: 2011 - Laser Science to Photonic Applications.

[24]  Muzammil Iqbal,et al.  Photonic ring resonance is a versatile platform for performing multiplex immunoassays in real time. , 2017, Journal of immunological methods.

[25]  R Baets,et al.  Heterogeneous integration of electrically driven microdisk based laser sources for optical interconnects and photonic ICs. , 2006, Optics express.

[26]  Klas Hjort,et al.  Plasma-assisted InP-to-Si low temperature wafer bonding , 2002 .

[27]  G. Roelkens,et al.  Heterogeneous integration of III-V membrane devices and ultracompact SOI waveguides , 2004, Digest of the LEOS Summer Topical Meetings Biophotonics/Optical Interconnects and VLSI Photonics/WBM Microcavities, 2004..