Polycrystalline Si under strain: Elastic and lattice‐dynamical considerations

Expressions are derived for the effective phonon deformation potentials of polycrystalline materials, based on the properties of tensor invariants and the Voigt–Reuss–Hill averages [Proc. Phys. Soc. London Sect. A 65, 349 (1952)]. These results, and similar ones for the elastic constants, are used to determine the effect of strains on the long‐wavelength optical phonons exhibited by such materials. Application to polycrystalline Si shows that under a uniaxial or biaxial stress, the triply degenerate phonons split into singlet and doublet components that shift at different rates and appear indistinguishably in the Raman spectrum. The implications of such effects on the Raman band shape are discussed.

[1]  E. F. Steigmeier,et al.  High quality polysilicon by amorphous low pressure chemical vapor deposition , 1983 .

[2]  T. F. Retajczyk,et al.  Effect of phosphorus doping on stress in silicon and polycrystalline silicon , 1983 .

[3]  Robert Bruce Lindsay,et al.  Physical Properties of Crystals , 1957 .

[4]  S. Nakashima,et al.  Raman scattering from ZnTe-ZnSe strained-layer superlattices , 1986 .

[5]  Rudolf Zeller,et al.  Elastic Constants of Polycrystals , 1973 .

[6]  Keiichi Yamamoto,et al.  Raman Scattering Characterization of Residual Stresses in Silicon-on-Sapphire , 1984 .

[7]  Sauér,et al.  Raman phonon piezospectroscopy in GaAs: Infrared measurements. , 1987, Physical review. B, Condensed matter.

[8]  J. V. D. Veen,et al.  Silicon strained layers grown on GaP(001) by molecular beam epitaxy , 1985 .

[9]  Herbert F. Wang,et al.  Single Crystal Elastic Constants and Calculated Aggregate Properties. A Handbook , 1971 .

[10]  D. M. Mills,et al.  Time‐resolved x‐ray diffraction measurement of the temperature and temperature gradients in silicon during pulsed laser annealing , 1983 .

[11]  A. Maradudin,et al.  Dynamical properties of solids , 1985 .

[12]  C. Raman,et al.  Scattering of Light in Crystals , 1945, Nature.

[13]  S. Nakashima,et al.  The evaluation of the crystallinity of laser-annealed polycrystalline silicon-on-silicon structures by Raman-microprobe polarization measurements , 1984 .

[14]  R. Hill The Elastic Behaviour of a Crystalline Aggregate , 1952 .

[15]  E. Burstein,et al.  Morphic effects II-effects of external forces on the frequencies of theq ≈ 0 optical phonons , 1971 .