State of the Art of Si-Based Integrated Circuit Technology

In recent years,there have been a large number of reports on the development of microelectronics,or IC technology.Also,the market trend and technological demand,as well as application prospect,have been dealt with in quite a number of literatures.In this paper,an overview is made on the state of the art of Si-based IC technologies,including microelectronic material,device,process and circuit,with emphasis particularly on the technological development.