Defect detection and property evaluation of indium tin oxide conducting glass using optical coherence tomography.

This study demonstrates a new approach for evaluating the properties of indium tin oxide (ITO) conducting glass and identifying defects using optical coherence tomography (OCT). A swept-source OCT system was implemented to scan the ITO conducting glass to enable two-dimensional or three-dimensional imaging. With OCT scanning, the defects can be clearly identified at various depths. Several parameters in addition to morphological information can be estimated simultaneously, including the thickness of the glass substrate, the refractive index, reflection coefficient, and transmission coefficient, all of which can be used to evaluate the quality of ITO conducting glass. This study developed a modified method for evaluating the refractive index of glass substrates without having to perform multiple scans as well as a segmentation algorithm to separate the interfaces. The results show the potential of OCT as an imaging tool for the inspection of defects in ITO conducting glass.

[1]  Meng-Tsan Tsai,et al.  Application of optical coherence tomography to monitoring the subsurface morphology of archaic jades , 2003, CLEO/Pacific Rim 2003. The 5th Pacific Rim Conference on Lasers and Electro-Optics (IEEE Cat. No.03TH8671).

[2]  E. Halpern,et al.  Quantification of Macrophage Content in Atherosclerotic Plaques by Optical Coherence Tomography , 2003, Circulation.

[3]  Mikio Takai,et al.  High-speed maskless laser patterning of indium tin oxide thin films , 1998 .

[4]  Iwona Gorczynska,et al.  Comparison of three-dimensional optical coherence tomography and high resolution photography for art conservation studies. , 2007, Optics express.

[5]  J. Fujimoto,et al.  Optical Coherence Tomography , 1991 .

[6]  T. Yatagai,et al.  In vivo high-contrast imaging of deep posterior eye by 1-microm swept source optical coherence tomography and scattering optical coherence angiography. , 2007, Optics express.

[7]  Chih-Jen Yu,et al.  High speed interferometric ellipsometer. , 2008, Optics express.

[8]  M. Ohmi,et al.  Simultaneous measurement of the phase and group indices and the thickness of transparent plates by low-coherence interferometry. , 1998, Optics letters.

[9]  T. Yatagai,et al.  Three-dimensional and high-speed swept-source optical coherence tomography for in vivo investigation of human anterior eye segments. , 2005, Optics express.

[10]  J. F. de Boer,et al.  Spectral/Fourier Domain Optical Coherence Tomography , 2008 .

[11]  B. Chiou,et al.  Antireflective coating for ITO films deposited on glass substrate , 1999 .

[12]  Changhuei Yang,et al.  Sensitivity advantage of swept source and Fourier domain optical coherence tomography. , 2003, Optics express.

[13]  Akiko Hirai,et al.  Low-coherence tandem interferometer for measurement of group refractive index without knowledge of the thickness of the test sample. , 2003, Optics letters.

[14]  Hsiang-Chieh Lee,et al.  Effective indicators for diagnosis of oral cancer using optical coherence tomography. , 2008, Optics express.

[15]  S. Yun,et al.  High-speed optical frequency-domain imaging. , 2003, Optics express.

[16]  Byeong Ha Lee,et al.  Simultaneous measurement of refractive index and thickness by combining low-coherence interferometry and confocal optics. , 2008, Optics express.

[17]  J. Manifacier,et al.  Thin metallic oxides as transparent conductors , 1982 .

[18]  A. Fercher,et al.  Performance of fourier domain vs. time domain optical coherence tomography. , 2003, Optics express.

[19]  J. Duker,et al.  Ultrahigh-resolution, high-speed, Fourier domain optical coherence tomography and methods for dispersion compensation. , 2004, Optics express.

[20]  S. Yun,et al.  High-speed spectral-domain optical coherence tomography at 1.3 mum wavelength. , 2003, Optics express.

[21]  J. Fujimoto,et al.  Three-dimensional endomicroscopy using optical coherence tomography , 2007 .

[22]  Young-Sik Ghim,et al.  Thin-film thickness profile and its refractive index measurements by dispersive white-light interferometry. , 2006, Optics express.

[23]  J. Fujimoto,et al.  Determination of the refractive index of highly scattering human tissue by optical coherence tomography. , 1995, Optics letters.

[24]  T. Kido,et al.  Optical charge-sensing method for testing and characterizing thin-film transistor arrays , 1995 .

[25]  J. Fujimoto,et al.  Buffered Fourier domain mode locking: Unidirectional swept laser sources for optical coherence tomography imaging at 370,000 lines/s. , 2006, Optics letters.

[26]  Shuichi Makita,et al.  Automatic characterization and segmentation of human skin using three-dimensional optical coherence tomography. , 2006, Optics express.

[27]  Teresa C. Chen,et al.  Ultrahigh-resolution high-speed retinal imaging using spectral-domain optical coherence tomography. , 2004, Optics express.

[28]  M. Sivak,et al.  Image analysis for classification of dysplasia in Barrett’s esophagus using endoscopic optical coherence tomography , 2010, Biomedical optics express.