Arrangement of Nanosized Ceramic Particles on Self-Assembled Monolayers

The fabrication of novel micro/nano-sized devices by assembling inorganic particles is anticipated for future microelectronics which will make use of their attractive functions. The surface modification of self-assembled monolayers (SAMs) was studied to prepare templates for sphere assembly. Phenyl groups of SAM were modified into silanol groups by UV irradiation through a photomask, by applying an electric current using an atomic force microscope (AFM) probe, or by contact pressure with a diamond tip. They were used as templates to arrange fine inorganic particles. In addition to the formation of ester bonds, siloxane bond formation between spheres and SAMs was also found to be effective for sphere arrangement. Low-dimensional close-packing of SiO2 spheres was achieved through the formation of siloxane bonds. The two-dimensional arrangement of functional particles on SAMs in a controlled manner through the formation of strong chemical bonds, such as ester bonds or siloxane bonds, can be applied to the microfabrication of ceramic devices.