In this paper, a systematic approach is proposed to modeling precision engineering surfaces. It attempts to consider all aspects of the machining process to obtain high quality surfaces. This approach integrates the inputs from machine tools, operation conditions, cutting tools and work materials with the surfaces machined as the output based on mathematical transforms. Wavelet transform, fiactal and chaos theory are used in the modeling. Preliminary research results show that the proposed approach and modeling techniques are very promising, albeit more research and machining trails are needed to further validate the approach.