论文信息 - High temperature Pt/LGS SAW sensor: From theory to experiment

High temperature Pt/LGS SAW sensor: From theory to experiment

This paper describes the use of a general purpose modified simulator, first developed by K. Hashimoto to determine a priori the device responses of the specify Pt/LGS Y-X structure. The parameters for the analysis are determined as a function of the electrode type (physical constants, thickness) and substrate. The simulation responses are analyzed and compared to the experimental results and we should conclude how effectively the modified simulator is applicable to assessing Pt/LGS Y-X device performances as a function of temperature.

[1] Emmanuel P. Papadakis. Tabulation of the coefficients of a quadratic function for the thermal expansion of various alloys and other engineering materials , 1972 .

[2] F. Sarry,et al. Extraction of COM parameters on Pt/LGS for high temperature SAW sensor , 2008, 2008 IEEE Ultrasonics Symposium.

[3] R. Mclellan,et al. High-temperature elastic constants of platinum single crystals , 1992 .

[4] M. D. da Cunha,et al. Recent measurements of material constants versus temperature for langatate, langanite and langasite , 2000, Proceedings of the 2000 IEEE/EIA International Frequency Control Symposium and Exhibition (Cat. No.00CH37052).

[5] Ken-ya Hashimoto,et al. General-purpose simulator for leaky surface acoustic wave devices based on coupling-of-modes theory , 1996, 1996 IEEE Ultrasonics Symposium. Proceedings.

[6] Sang Dae Yu,et al. Simulation of surface acoustic wave devices. , 2004, IEEE transactions on ultrasonics, ferroelectrics, and frequency control.

[7] Victor Plessky,et al. A two parameter coupling-of-modes model for shear horizontal type SAW propagation in periodic gratings , 1993 .

[8] K. Hashimoto. Surface Acoustic Wave Devices in Telecommunications , 2000 .