Impact of high-k gate dielectric on analog and RF performance of nanoscale DG-MOSFET

Now a days, high-k dielectrics have been investigated as an alternative to Silicon dioxide (SiO"2) based gate dielectric for nanoscale semiconductor devices. This paper is an attempt to characterize the analog and RF performance of the high-k metal gate (HKMG) double gate (DG) metal oxide semiconductor field effect transistor (MOSFET) in nanoscale through 2-D device simulation. The results demonstrates the impact of high-k oxide layer as single and gate stack (GS). The key idea behind this investigation is to provide a physical explanation for the improved analog and RF performance exhibited by the device. The major figures of merit (FOMs) studied in this paper are transconductance (g"m), output conductance (g"d), transconductance generation factor (g"m/I"D), early voltage (V"E"A), intrinsic gain (A"V), cut off frequency (f"T), transconductance frequency product (TFP), gain frequency product (GFP) and gain transconductance frequency product (GTFP). The effects of downscaling of channel length (L) on analog performance of the proposed devices have also been presented. It has been observed that the performance enhancement of GS configurations (k=7.5 i.e device D5 in the study) is encouraging as far as the nanoscale DG-MOSFET is concerned. Also it significantly reduces the short channel effects (SCEs). Parameters like DC gain of (91.257dB, 43.436dB), nearly ideal values (39.765V^-^1, 39.589V^-^1) of TGF, an early voltage of (2.73V, 16.897V), cutoff frequency (294GHz, 515.5GHz) and GTFP of (5.14x10^5GHz/V, 1.72x10^5GHz/V) for two different values of V"D"S=0.1V and 0.5V respectively are found to be close to ideal values. Analysis shows an opportunity for realizing high performance analog and RF circuits with the device proposed in this paper i.e. device D5.

[1]  S. Thompson MOS Scaling: Transistor Challenges for the 21st Century , 1998 .

[2]  Isabelle Ferain,et al.  Multigate transistors as the future of classical metal–oxide–semiconductor field-effect transistors , 2011, Nature.

[3]  J.M.C. Stork,et al.  The impact of high-/spl kappa/ gate dielectrics and metal gate electrodes on sub-100 nm MOSFETs , 1999 .

[4]  Chandan Kumar Sarkar,et al.  Investigation of novel attributes of single halo dual-material double gate MOSFETs for analog/RF applications , 2009, Microelectron. Reliab..

[5]  S. Chakraborty,et al.  Subthreshold Performance of Dual-Material Gate CMOS Devices and Circuits for Ultralow Power Analog/Mixed-Signal Applications , 2008, IEEE Transactions on Electron Devices.

[6]  Yuan Taur,et al.  Device scaling limits of Si MOSFETs and their application dependencies , 2001, Proc. IEEE.

[7]  D. Nirmal,et al.  Subthreshold analysis of nanoscale FinFETs for ultra low power application using high-k materials , 2013 .

[8]  T. Skotnicki,et al.  The end of CMOS scaling: toward the introduction of new materials and structural changes to improve MOSFET performance , 2005, IEEE Circuits and Devices Magazine.

[9]  A. Mallik,et al.  Tunnel Field-Effect Transistors for Analog/Mixed-Signal System-on-Chip Applications , 2012, IEEE Transactions on Electron Devices.

[10]  Y. Tosaka,et al.  Scaling theory for double-gate SOI MOSFET's , 1993 .

[11]  G. Ghibaudo,et al.  Review on high-k dielectrics reliability issues , 2005, IEEE Transactions on Device and Materials Reliability.

[12]  Jean-Pierre Colinge,et al.  Multiple-gate SOI MOSFETs , 2004 .

[13]  M. Gupta,et al.  TCAD Assessment of Device Design Technologies for Enhanced Performance of Nanoscale DG MOSFET , 2011, IEEE Transactions on Electron Devices.

[14]  Jeffrey Bokor,et al.  Extremely scaled silicon nano-CMOS devices , 2003, Proc. IEEE.

[15]  Chandan Kumar Sarkar,et al.  Effect of gate engineering in double-gate MOSFETs for analog/RF applications , 2012, Microelectron. J..

[16]  M. Bucher,et al.  Device Design Engineering for Optimum Analog/RF Performance of Nanoscale DG MOSFETs , 2012, IEEE Transactions on Nanotechnology.

[17]  S. M. Sze,et al.  Physics of semiconductor devices , 1969 .

[18]  M. Vinet,et al.  Experimental evaluation of gate architecture influence on DG SOI MOSFETs performance , 2005, IEEE Transactions on Electron Devices.

[19]  H.-S. Philip Wong Beyond the conventional transistor , 2002, IBM J. Res. Dev..

[20]  C. Hu,et al.  A comparative study of advanced MOSFET concepts , 1996 .

[21]  Denis Flandre,et al.  Influence of device engineering on the analog and RF performances of SOI MOSFETs , 2003 .

[22]  Jean-Pierre Colinge,et al.  Fully-depleted SOI CMOS for analog applications , 1998 .

[23]  Byoung Hun Lee,et al.  Metal Electrode/High-$k$ Dielectric Gate-Stack Technology for Power Management , 2008, IEEE Transactions on Electron Devices.

[24]  Sorin Cristoloveanu,et al.  Frontiers of silicon-on-insulator , 2003 .

[25]  M. J. Kumar,et al.  Controlling short-channel effects in deep-submicron SOI MOSFETs for improved reliability: a review , 2004, IEEE Transactions on Device and Materials Reliability.

[26]  C.K. Sarkar,et al.  Influence of Channel and Gate Engineering on the Analog and RF Performance of DG MOSFETs , 2010, IEEE Transactions on Electron Devices.

[27]  Behzad Razavi CMOS technology characterization for analog and RF design , 1999 .