Ceramic thin film thermocouples for SiC-based ceramic matrix composites

Abstract Conductive ceramic thin film thermocouples were investigated for application to silicon carbide fiber reinforced silicon carbide ceramic matrix composite (SiC/SiC CMC) components. High temperature conductive oxides based on indium and zinc oxides were selected for testing to high temperatures in air. Sample oxide films were first sputtered-deposited on alumina substrates then on SiC/SiC CMC sample disks. Operational issues such as cold junction compensation to a 0 °C reference, resistivity and thermopower variations are discussed. Results show that zinc oxides have an extremely high resistance and thus increased complexity for use as a thermocouple, but thermocouples using indium oxides can achieve a strong, nearly linear response to high temperatures.

[1]  R. Glang,et al.  Handbook of Thin Film Technology , 1970 .

[2]  I. E. Campbell,et al.  High‐Temperature Materials and Technology , 1968 .

[3]  N. Bansal.  Mechanical properties of Hi-Nicalon fiber-reinforced celsian composites after high-temperature exposures in air , 2009 .

[4]  Greg Gillen,et al.  High temperature materials for thin-film thermocouples on silicon wafers , 2000 .

[5]  F. Smits.  Measurement of sheet resistivities with the four-point probe , 1958 .

[6]  Gustave C. Fralick,et al.  Preparation and characterization of ceramic thin film thermocouples , 2010 .

[7]  Herbert A. Will,et al.  Thin-film thermocouples and strain-gauge technologies for engine applications , 1998 .

[8]  Mark van Roode,et al.  Ceramic gas turbine design and test experience , 2002 .

[9]  W. M. Dale.  Temperature, Its Measurement and Control in Science and Industry , 1963 .

[10]  Narottam P. Bansal,et al.  Upper Temperature Limit of Environmental Barrier Coatings Based on Mullite and BSAS , 2003 .

[11]  J. Deschanvres,et al.  Thin films of high-resistivity zinc oxide produced by a modified CVD method , 1992 .

[12]  Otto J. Gregory,et al.  Thin‐Film Thermocouples Based on the System In2O3–SnO2 , 2011 .

[13]  M. Ferenets,et al.  Thin Solid Films , 2010 .

[14]  太田 豊彦,et al.  39th AIAA/ASME/SAE/ASEE Joint Propulsion Conference & Exhibit 報告 , 2003 .

[15]  R. Huebener.  Effect of Phonon Drag on the Electrical Resistivity of Metals , 1966 .

[16]  K. L. Chopra,et al.  Thin Film Phenomena , 1969 .

[17]  N. Lakshminarayan,et al.  Optical and electrical investigations of indium oxide thin films prepared by thermal oxidation of indium thin films , 1996 .

[18]  N. Jacobson,et al.  New generation of plasma-sprayed mullite coatings on silicon carbide , 1995 .

[19]  T. Clyne,et al.  Mechanical stability of DLC films on metallic substrates Part II ? Interfacial toughness, debonding and blistering , 1998 .

[20]  Thin film metallization of oxides in microelectronics , 1973 .