论文信息 - Improved deposition process of CVD-(Ba,Sr)TiO3 on Ru - 字舞流文

Improved deposition process of CVD-(Ba,Sr)TiO3 on Ru

Takehiko Sato | S. Matsuno | T. Takenaga | M. Yamamuka | T. Shibano | T. Kuroiwa | M. Tarutani | T. Kawahara | T. Horikavva | Y. Yoneda