H MINIMIZATION OF ACOUSTIC ENERG HINED LATERAL-MODE RESONATORS

This paper describes a technique to quality factor (Q) of lateral-mode piezoele by reducing the amount of acoustic energy l support tethers. Trenches are etched in the surrounding the resonator at a specific dis resonator edge to function as an acou Resonators with optimized reflectors con improved Q’s compared to similar devic reflectors. The highest measured unloaded vacuum (at ~115MHz), upwards of 45% over the highest Q recorded from the d reflectors.