A large workspace flexure hinge-based parallel manipulator system

Parallel manipulator systems as promising precision devices are used widely in current researches. A novel large workspace flexure parallel manipulator system utilizing wide-range flexure hinges as passive joints is proposed in this paper, which call attain sub-micron-scale precision over the cubic centimeter motion range. This paper introduces the mechanical system architecture based on the wide-range flexure hinges, analyzes the kinematics via stiffness matrices, presents the control system configuration and control strategy, and finally gives the system performance test results.