Enhanced oxidation of TiAlN barriers integrated in three-dimensional ferroelectric capacitor structures
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L. Goux | D. Wouters | V. Paraschiv | J. Lisoni | L. Haspeslagh | J. Johnson | D. Maes | H. V. Meeren | R. Zambrano | M. Willegems | C. Caputa | C. Turquat | C. Muller