Examples of Applications of Industrial Control Systems (PLCs) for Vacuum Equipment

This paper describes some developments in the domain of vacuum controls, using industrial control systems (Programmable Logic Controllers or PLCs). After showing the different advantages of the PLC for vacuum applications, when compared with a specific solution, we mention the main points that led us to make this choice. Then, we describe some realisations (pumping groups and test benches for vacuum chambers) using a PLC and the related fieldbuses to interconnect these controllers to the upper layer of the control system. Finally, we sketch out one of the possible solutions to control some vacuum equipment of the future LHC machine.