Recent developments and research challenges in electrochemical micromachining (µECM)

Electrochemical machining (ECM) and especially electrochemical micromachining (μECM) became an attractive area of research due to the fact that this process does not create any defective layer after machining and that there is a growing demand for better surface integrity on different micro-applications such as microfluidics systems and stress free drilled holes in automotive and aerospace manufacturing with complex shapes. Electrochemical machining is a non-conventional machining process based on the phenomenon of electrolysis. This process requires maintaining a small gap (size of a few μm)—the inter-electrode gap—between the anode (workpiece) and the cathode (tool electrode) in order to achieve acceptable machining results (i.e. accuracy, high aspect ratio with appropriate material removal rate and efficiency). This paper presents different problematic areas of electrochemical micromachining (often referred to as electrochemical micromachining or μECM). The aim of this paper is to address the problems met by the μECM technology developers and to present the current state-of-the-art solutions.

[1]  P. Asokan,et al.  Development of multi-objective optimization models for electrochemical machining process , 2008 .

[2]  Hoda Hosny Abuzied,et al.  Prediction of Electrochemical Machining Process Parameters using Artificial Neural Networks , 2012 .

[3]  Kamlakar P Rajurkar,et al.  Modelling and Monitoring Interelectrode Gap in Pulse Electrochemical Machining , 1995 .

[4]  Yong Liu,et al.  Development of microelectrodes for electrochemical micromachining , 2011 .

[5]  Takahisa Masuzawa,et al.  Wire Electro-Discharge Grinding for Micro-Machining , 1985 .

[6]  T. Tang,et al.  Hybrid MOSFET/Driver for Ultra-Fast Switching , 2008, 2008 IEEE International Power Modulators and High-Voltage Conference.

[7]  A. Sherlock,et al.  Real-time parameterization of electrochemical machining by ultrasound measurement of the interelectrode gap , 2007 .

[8]  J. Meijer,et al.  Characteristic numbers to describe the detail transfer quality of electro-chemical machining , 1984 .

[9]  Grzegorz Skrabalak,et al.  Building of rules base for fuzzy-logic control of the ECDM process , 2004 .

[10]  F. M. Ozkeskin,et al.  Feedback Controlled High Frequency Electrochemical Micromachining , 2008 .

[11]  J. A. McGeough,et al.  New developments in the process control of the hybrid electro chemical discharge machining (ECDM) process , 2005 .

[12]  Murali M. Sundaram,et al.  Modeling and fabrication of micro tools by pulsed electrochemical machining , 2012 .

[13]  Johan Deconinck,et al.  A temperature dependent multi-ion model for time accurate numerical simulation of the electrochemical machining process. Part III: Experimental validation , 2012 .

[14]  Liu Yong,et al.  Experimental Investigation on Complex Structures Machining by Electrochemical Micromachining Technology , 2010 .

[15]  T. Wagner.  High rate electrochemical dissolution of iron-based alloys in NaCl and NaNO3 electrolytes , 2002 .

[16]  Harmen S.J. Altena.  EDM and ECM for mass production Philips DAP , 2004 .

[17]  J. Kozak.  Computer simulation system for electrochemical shaping , 2001 .

[18]  Madhav Datta,et al.  Electrochemical micromachining: An environmentally friendly, high speed processing technology , 1997 .

[19]  Hans-Peter Schulze,et al.  Demands on process and process energy sources for the electro-erosive and electrochemical micro machining , 2008 .

[20]  Shih-Yu Huang,et al.  Improvement of machining accuracy by fuzzy logic at corner parts for wire-EDM , 2001, Fuzzy Sets Syst..

[21]  Duc Truong Pham,et al.  Micro-EDM—recent developments and research issues , 2004 .

[22]  Johan Deconinck,et al.  Development of Simulation Software Package for Nano-Pulsed Electrochemical Micro Machining , 2011 .

[23]  L. Hourng,et al.  Experimental investigation on the influence of electrochemical micro-drilling by short pulsed voltage , 2011, The International Journal of Advanced Manufacturing Technology.

[24]  Zhiyong Li,et al.  Machining Accuracy Prediction of Aero-engine Blade in Electrochemical Machining Based on BP Neural Network , 2009 .

[25]  Bin Wei.  Modeling and analysis of pulse electrochemical machining , 1994 .

[26]  P. K. Srivastava,et al.  Effect of electrolyte on the current-carrying process in electrochemical machining , 2007 .

[27]  Grzegorz Skrabalak,et al.  Some aspects of the electrochemical machining process supported by electrode ultrasonic vibrations optimization , 2003 .

[28]  A. W. Labib,et al.  Towards next generation electrochemical machining controllers: A fuzzy logic control approach to ECM , 2011, Expert Syst. Appl..

[29]  Z. Gulbinowicz,et al.  The Mathematical Modeling and Computer Simulation of Pulse Electrochemical Micromachining , 2008, Eng. Lett..

[30]  Saeed Zare Chavoshi.  Analysis and predictive modeling of performance parameters in electrochemical drilling process , 2011 .

[31]  Zhong Ning Guo,et al.  Development of Ultra-Short Pulse Power Supply Applicable to Micro-ECM , 2009 .

[32]  Hans-Peter Schulze.  Problems of the processing accuracy for electro-erosion and electro-chemical machining processes , 2009 .

[33]  D. Landolt,et al.  Fundamental aspects and applications of electrochemical microfabrication , 2000 .

[34]  J. Schultze,et al.  Electrochemical machining of the steel 100Cr6 in aqueous NaCl and NaNO3 solutions: microstructure of surface films formed by carbides , 2001 .

[35]  Shi Hyoung Ryu,et al.  Fabrication of WC micro-shaft by using electrochemical etching , 2006 .

[36]  J. A. McGeough,et al.  Principles of electrochemical machining , 1974 .

[37]  B. Bhattacharyya,et al.  Experimental investigation on the influence of electrochemical machining parameters on machining rate and accuracy in micromachining domain , 2003 .

[38]  P. C. Pandey,et al.  Tooling Design for ECM—A Finite Element Approach , 1981 .

[39]  Chong Nam Chu,et al.  Analysis of the side gap resulting from micro electrochemical machining with a tungsten wire and ultrashort voltage pulses , 2008 .

[40]  D. Landolt,et al.  Electrochemical micromachining, polishing and surface structuring of metals: fundamental aspects and new developments , 2003 .

[41]  Matthias Kock,et al.  Electrochemical micromachining with ultrashort voltage pulses–a versatile method with lithographical precision , 2003 .

[42]  W. Daud,et al.  Removal of Hexavalent Chromium-Contaminated Water and Wastewater: A Review , 2009 .

[43]  J. Kozak,et al.  CAE-ECM system for electrochemical technology of parts and tools , 2000 .

[44]  Abishek B. Kamaraj,et al.  Ultra high aspect ratio penetrating metal microelectrodes for biomedical applications , 2013 .

[45]  Chong Nam Chu,et al.  Micro ECM with ultrasonic vibrations using a semi-cylindrical tool , 2009 .

[46]  Di Zhu,et al.  Theoretical and experimental investigation on electrochemical micromachining , 2007 .

[47]  Marius Purcar,et al.  3D electrochemical machining computer simulations , 2004 .

[48]  Zhaoyang Zhang,et al.  A Micro-machining system based on electrochemical dissolution of material , 2011 .

[49]  B. Bhattacharyya,et al.  Advancement in electrochemical micro-machining , 2004 .

[50]  Sushanta K. Mitra,et al.  Modeling of electrochemical micromachining: comparison to experiments , 2008 .

[51]  J. A. McGeough,et al.  Precision ECM by Process Characteristic Modelling , 2000 .

[52]  L. Hourng,et al.  Electrochemical micro-drilling of deep holes by rotational cathode tools , 2011 .

[53]  Wang Zhenlong,et al.  Effects of Complexing Agent on Electrochemical Micro Machining of Stainless Steel , 2010 .

[54]  Min Ho Kwon,et al.  Micro Electrochemical Machining for Complex Internal Micro Features , 2008, 2008 International Conference on Smart Manufacturing Application.

[55]  B. Bhattacharyya,et al.  Experimental study on electrochemical micromachining , 2005 .

[56]  Dar-Yuan Chang,et al.  Process Simulation–Assisted Fabricating Micro-Herringbone Grooves for a Hydrodynamic Bearing in Electrochemical Micromachining , 2011 .

[57]  B. Doloi,et al.  Electrochemical micro-machining: new possibilities for micro-manufacturing , 2001 .

[58]  Yang Leng,et al.  Electrochemical micromachining of titanium surfaces for biomedical applications , 2005 .

[59]  Gualtiero Fantoni,et al.  A step towards the in-process monitoring for electrochemical microdrilling , 2011 .

[60]  Heinz Kück,et al.  Electrochemical Micromachining of Stainless Steel by Ultrashort Voltage Pulses , 2003 .

[61]  B. Yan,et al.  Improvement of Electrochemical Microdrilling Accuracy Using Helical Tool , 2008 .

[62]  Gyeong S. Hwang,et al.  Two-dimensional computational model for electrochemical micromachining with ultrashort voltage pulses , 2004 .

[63]  Gerhard Ertl,et al.  Electrochemical machining of stainless steel microelements with ultrashort voltage pulses , 2001 .

[64]  J. A. McGeough,et al.  Influence of Electrolyte Concentration on Copying Accuracy of Precision-ECM , 2003 .

[65]  John L. Hudson,et al.  Single-step electrochemical machining of complex nanostructures with ultrashort voltage pulses , 2003 .

[66]  B. Yan,et al.  Bending strength analysis of micro WC-shaft manufactured by micro electro-discharge machining , 2005 .

[67]  Shi Hyoung Ryu,et al.  Electro-chemical micro drilling using ultra short pulses , 2004 .

[68]  D. Zhu,et al.  Fabrication of multiple electrodes and their application for micro-holes array in ECM , 2009 .

[69]  Sio-Iong Ao.  IAENG Transactions on Engineering Technologies Volume 2: Special Edition of the World Congress on Engineering and Computer Science , 2009, WCE 2009.

[70]  Marco Leone,et al.  The pulse electrochemical micromachining (PECMM) , 2009 .

[71]  Johan Deconinck,et al.  Current Distributions and Electrode Shape Changes in Electrochemical Systems , 1992 .

[72]  Chong Nam Chu,et al.  The Effects of Tool Electrode Size on Characteristics of Micro Electrochemical Machining , 2006 .

[73]  Srichand Hinduja,et al.  Modelling of the electrochemical machining process by the boundary element method , 2010 .

[74]  Yoshikazu Arai,et al.  Measurement of multi-degree-of-freedom error motions of a precision linear air-bearing stage , 2006 .

[75]  A. D. Davydov,et al.  Electrochemical machining of metals: Fundamentals of electrochemical shaping , 2004 .

[76]  Kamlakar P Rajurkar,et al.  Study of Pulse Electrochemical Machining Characteristics , 1993 .

[77]  Abishek B. Kamaraj,et al.  Mathematical modeling and verification of pulse electrochemical micromachining of microtools , 2013 .

[78]  B. Bhattacharyya,et al.  Influence of tool vibration on machining performance in electrochemical micro-machining of copper , 2007 .

[79]  S. Hinduja,et al.  The prediction of workpiece shape during electrochemical machining by the boundary element method , 1986 .

[80]  Ji-Woo Park,et al.  A Study on Electrochemical Micromachining for Fabrication of Microgrooves in an Air-Lubricated Hydrodynamic Bearing , 2002 .

[81]  D Clifton,et al.  Ultrasonic measurement of the inter-electrode gap in electrochemical machining , 2002 .

[82]  D. Boroyevich,et al.  Evaluation of the switching characteristics of a gallium-nitride transistor , 2011, 2011 IEEE Energy Conversion Congress and Exposition.

[83]  C. R. Cho,et al.  A study of the characteristics for electrochemical micromachining with ultrashort voltage pulses , 2006 .

[84]  J. McGeough,et al.  Temperature distribution along the gap in electrochemical machining , 1977 .

[85]  K. Rajurkar,et al.  Study of Pulse Electrochemical Micromachining , 2004 .

[86]  Jason Yon,et al.  Design study of a three-phase brushless exciter for aircraft starter/generator , 2011, 2011 IEEE Energy Conversion Congress and Exposition.

[87]  Chong Nam Chu,et al.  Micro Electrochemical Machining of 3D Micro Structure Using Dilute Sulfuric Acid , 2005 .

[88]  Jason D. Harper,et al.  A Compact High Voltage Nanosecond Pulse Generator , 2008 .

[89]  Kamlakar P Rajurkar,et al.  Some Aspects of ECM Performance and Control , 1988 .

[90]  Dirk Bähre,et al.  Investigation on Pulse Electrochemical Machining Characteristics of Lamellar Cast Iron using a Response Surface Methodology-Based Approach☆ , 2013 .

[91]  A. K. Swain.  Preparation of Coated Microtools for Electrochemical Machining Applications , 2010 .

[92]  J. Deconinck,et al.  A temperature dependent multi-ion model for time accurate numerical simulation of the electrochemical machining process. Part I: Theoretical basis , 2012 .

[93]  M. Datta,et al.  Proceedings of the Symposium on High Rate Metal Dissolution Processes , 1996 .

[94]  Kamlakar P Rajurkar,et al.  Micro and Nano Machining by Electro-Physical and Chemical Processes , 2006 .

[95]  Shi Hyoung Ryu,et al.  Micro electrochemical milling , 2005 .

[96]  Di Zhu,et al.  Micro electrochemical milling of complex structures by using in situ fabricated cylindrical electrode , 2012 .

[97]  C. Bignon,et al.  Application of Eddy Currents to the In-Process Measurement of the Gap in E.C.M. , 1982 .

[98]  Zhiwei Zhou,et al.  Development of a Soft-Computer Numerical Control System for Micro-Electrochemical Machining , 2010 .

[99]  Liu Kai,et al.  Fuzzy Controlling Interelectrode Gap of ECM Based on 6 Dimensional Forces and Machining Current , 2010, 2010 International Conference on Intelligent System Design and Engineering Application.

[100]  Zheng Yunfei,et al.  Localized electrochemical micromachining with gap control , 2003 .

[101]  Gualtiero Fantoni,et al.  The effect of high frequency and duty cycle in electrochemical microdrilling , 2011 .

[102]  R. Schuster.  Electrochemical microstructuring with short voltage pulses. , 2007, Chemphyschem : a European journal of chemical physics and physical chemistry.

[103]  M. Mithu,et al.  On how tool geometry, applied frequency and machining parameters influence electrochemical microdrilling , 2012 .

[104]  Di Zhu,et al.  Preparation of Turbulated Cooling Hole for Gas Turbine Blade Using Electrochemical Machining , 2007 .

[105]  Kamlakar P Rajurkar,et al.  Selected problems of micro-electrochemical machining , 2004 .

[106]  Chong Nam Chu,et al.  Analysis of the electrochemical behaviors of WC–Co alloy for micro ECM , 2013 .

[107]  F. Bleicher,et al.  Some Contributions at the Technology of Electrochemical Micromachining with Ultra Short Voltage Pulses , 2012 .

[108]  Sami Ekici,et al.  An adaptive neuro-fuzzy inference system (ANFIS) model for wire-EDM , 2009, Expert Syst. Appl..

[109]  D. Zhu,et al.  Improvement of electrochemical machining accuracy by using dual pole tool , 2002 .