On the figure of merit of uncooled bolometers fabricated at INO

This paper reports the NETD values of various uncooled bolometers fabricated at INO. They are measured using an external readout circuit that emulates the readout scheme of a commercial ROIC. The measured NETD values range between 6 and 75 mK, depending on the pixel pitch and response time. Pixel pitches of 12, 17 and 35 μm are considered. The figure of merit of the characterized detectors is below 350 mK*ms.

[1]  Hubert Jerominek,et al.  128 x 128 pixel uncooled bolometric FPA for IR detection and imaging , 1998, Optics & Photonics.

[2]  U. Mizrahi,et al.  Low-SWaP shutterless uncooled video core by SCD , 2015, Defense + Security Symposium.

[3]  Linda Marchese,et al.  Introducing a 384x288 pixel terahertz camera core , 2013, Photonics West - Optoelectronic Materials and Devices.

[4]  Linh Ngo Phong,et al.  Linear arrays of microbolometers for space applications , 2008, 2008 IEEE Sensors.

[5]  Samir Ilias,et al.  The EarthCARE broadband radiometer detectors , 2009, Optical Engineering + Applications.

[6]  O. Legras,et al.  Uncooled detector development for space application , 2008, SPIE Defense + Commercial Sensing.

[7]  Hubert Jerominek,et al.  Commercial and custom 160x120, 256x1, and 512x3 pixel bolometric FPAs , 2002, SPIE Defense + Commercial Sensing.

[8]  Neal R. Butler,et al.  Performance limits of uncooled VOx microbolometer focal plane arrays , 2004, SPIE Defense + Commercial Sensing.

[9]  Hubert Jerominek,et al.  256 x 1 and 256 x 40 pixel bolometer arrays for space and industrial applications , 1998, Optics & Photonics.

[10]  I. Pivnik,et al.  Large-format 17μm high-end VOx μ-bolometer infrared detector , 2013, Defense, Security, and Sensing.

[11]  Marc-André Boucher,et al.  Vanadium oxide thin film with improved sheet resistance uniformity , 2014, Defense + Security Symposium.

[12]  Christine Alain,et al.  Influence of pixel geometry on the 1/f noise coefficient , 2013, Defense, Security, and Sensing.

[13]  Jean-Louis Ouvrier-Buffet,et al.  Latest pixel size reduction of uncooled IR-FPA at CEA, LETI , 2012, Other Conferences.