Based on symmetric double tuning fork effect of full decoupling dual mass of silicon micro-gyroscope

The present invention discloses a method based on symmetric double tuning fork effect of full decoupling dual mass of silicon micro-gyroscope. The gyroscope comprises a vertical levels, the upper silicon micro-mechanical gyroscope module, the lower the signal lead coated with a glass substrate, a mechanical gyroscope module consists of two identical sub-modules, symmetrically placed horizontally, two by driving the coupling between the two sensing masses were folded and cross beams in the driving direction and the sensitive direction of the connection, so that the two sensing masses are related to each other in the driving mode and test mode. Each module includes a sub-sensitive mass, drive module, driver feedback module, the detection module, driver support beams, driver feedback support beams, testing support beams, beam-driven decoupling, the decoupling beam detection, detection coupled support beams, and a fixed anchor . The present invention two sub-modules using the same frequency inversion driving mode, the detection module differential detection, can effectively suppress the external shock, temperature, and the impact of processing defects, resistance to common mode errors ability.