Flexible Piezoelectric Energy-Harvesting Exploiting Biocompatible AlN Thin Films Grown onto Spin-Coated Polyimide Layers

The increasing demand of piezoelectric energy harvesters for wearable and implantable applications requires biocompatible materials and careful structural device design, paying special attention to the conformability characteristics, properly tailored to scavenge continuously electrical energy even from the tiniest body movements. This paper provides a comprehensive study on a flexible and biocompatible aluminum nitride (AlN) energy harvester based on a new alternative fabrication approach, exploiting a thin polyimide (PI) substrate, prepared by spin coating of precursors solution. This strategy allows manufacturing substrates with adjustable thickness to meet conformability requirements. The device is based on a piezoelectric AlN thin film, sputtered directly onto the soft PI substrate, without poling/annealing processes and patterned by simple and low cost microfabrication technologies. AlN active layer, grown on soft substrate, exhibits good morphological and structural properties with roughness root m...

[1]  Simona Petroni,et al.  Tactile multisensing on flexible aluminum nitride. , 2012, The Analyst.

[2]  S. Priya,et al.  Piezoelectric MEMS for energy harvesting , 2012 .

[3]  Sang Hoon Lee,et al.  Resistive Switching Memory Integrated with Nanogenerator for Self‐Powered Bioimplantable Devices , 2016 .

[4]  John X. J. Zhang,et al.  Thickness ratio and d33 effects on flexible piezoelectric unimorph energy conversion , 2016 .

[5]  Jin-Seok Park,et al.  Effects of bottom electrodes on the orientation of AlN films and the frequency responses of resonators in AlN-based FBARs , 2003 .

[6]  Dennis Hohlfeld,et al.  Modeling and characterization of MEMS-based piezoelectric harvesting devices , 2010 .

[7]  Nathan Jackson,et al.  Flexible-CMOS and biocompatible piezoelectric AlN material for MEMS applications , 2013 .

[8]  Kazuhiro Nonaka,et al.  Influence of aluminum nitride interlayers on crystal orientation and piezoelectric property of aluminum nitride thin films prepared on titanium electrodes , 2007 .

[9]  Xue Feng,et al.  Ultra-flexible Piezoelectric Devices Integrated with Heart to Harvest the Biomechanical Energy , 2015, Scientific Reports.

[10]  Debra J. Mascaro,et al.  Organic thin-film transistors: A review of recent advances , 2001, IBM J. Res. Dev..

[11]  Geon-Tae Hwang,et al.  Self‐Powered Wireless Sensor Node Enabled by an Aerosol‐Deposited PZT Flexible Energy Harvester , 2016 .

[12]  F. Maita,et al.  AlN texturing and piezoelectricity on flexible substrates for sensor applications , 2015 .

[13]  Geon-Tae Hwang,et al.  Flexible Piezoelectric Thin‐Film Energy Harvesters and Nanosensors for Biomedical Applications , 2015, Advanced healthcare materials.

[14]  Chang Kyu Jeong,et al.  Self‐Powered Cardiac Pacemaker Enabled by Flexible Single Crystalline PMN‐PT Piezoelectric Energy Harvester , 2014, Advanced materials.

[15]  John A Rogers,et al.  Conformal piezoelectric energy harvesting and storage from motions of the heart, lung, and diaphragm , 2014, Proceedings of the National Academy of Sciences.

[16]  Milos Nesladek,et al.  Physical properties of polycrystalline aluminium nitride films deposited by magnetron sputtering , 2004 .

[17]  L. Eric Cross,et al.  Theoretical analysis of the sensor effect of cantilever piezoelectric benders , 1999 .

[18]  Long Lin,et al.  Super-Flexible Nanogenerator for Energy Harvesting from Gentle Wind and as an Active Deformation Sensor , 2013 .

[19]  Chang Kyu Jeong,et al.  Highly‐Efficient, Flexible Piezoelectric PZT Thin Film Nanogenerator on Plastic Substrates , 2014, Advanced materials.

[20]  Massimo De Vittorio,et al.  Piezoelectric MEMS vibrational energy harvesters: Advances and outlook , 2017 .

[21]  Paul M. Weaver,et al.  Measurement techniques for piezoelectric nanogenerators , 2013 .

[22]  M. D. Vittorio,et al.  Flexible Force Sensor Based on C-axis Oriented Aluminum Nitride , 2014 .

[23]  Geon-Tae Hwang,et al.  Piezoelectric BaTiO₃ thin film nanogenerator on plastic substrates. , 2010, Nano letters.

[24]  Qifa Zhou,et al.  AlN piezoelectric thin films for energy harvesting and acoustic devices , 2018, Nano Energy.

[25]  F. Calle,et al.  Synthesis of c-axis oriented AlN thin films on different substrates: A review , 2010 .

[26]  Yuanfu Chen,et al.  Flexible, transparent and high-power triboelectric generator with asymmetric graphene/ITO electrodes , 2016, Nanotechnology.

[27]  Seok-Jin Yoon,et al.  Preparation on transparent flexible piezoelectric energy harvester based on PZT films by laser lift-off process , 2013 .