A Planar Type Eeprom Cell Structure By Standard CMOS Process And Applications

1. WTRODUCITON BIOS and m=odes for system controls are stored in EFROM or EEPROM chips and used with system control logic LSIS. Integration of GEPROM with l o g k ~ ~ ~ s , ~ a t e ~ r r i y , Standard Cell and Microprocessor bring many merits.But such integration requires EEPROM unique processings, ultra thin oxide, stackiqg of floating and control gates and others. We developed a Planar type EEPROM cell structure by Staadard CMOS process without any conventional EEPROM process. By this EEPROM cell structure, we can easily make EEPROM integraredGate Array,Standard Cell and Microprocessor LSIs with many merits of lower cost, more space s a w and easier micro-code storinghpdatmg, etc.