论文信息 - Simple, high precision linear‐motor‐driven XYΘ positioner (Walker)

Simple, high precision linear‐motor‐driven XYΘ positioner (Walker)

A very simple construction of a linear‐motor‐driven XYΘ positioner has been developed. The velocities can be controlled up to 4 mm/s. Positioning accuracy of better than 0.05 μm can easily be obtained.

[1] Toru Tojo,et al. Piezoelectrically driven XYθ table for submicron lithography systems , 1989 .

[2] V. Dudnikov,et al. Ion sources at the Novosibirsk Institute of Nuclear Physics (invited) , 1990 .

[3] John Clarke,et al. Two-dimensional, remote micropositioner for a scanning tunneling microscope , 1985 .