Discrete-Time Modelling of Sigma-Delta Inspired Systems for MEMS

This chapter discusses a variety of system structures for microelectromechanical systems (MEMS) that employ a feedback loop inspired by sigma-delta modulation. Sigma-delta modulators are classic electronic circuits that implement data conversion. The feedback loop typical for sigma-delta modulation can be applied to actuate a MEMS device or control its state. The dynamics of such systems are described by a set of discrete-time equations (map). We show how these maps can be derived for different examples of MEMS and highlight the dynamics that are universal for all examples.

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