Benefits from Amplification of Piezo Actuation in Inertial Stepping Motors and application for High-performance Linear Micro Motors

Stepping Piezo Actuators (SPA) are long stroke line ar piezoelectric actuators capable to reach long st roke (typ. >10mm) with an important resolution (typ. <1nm). It has been proposed to use Amplified Piezo Actuator int inertial stepper motor to build the SPA. This piezo m tor showed good behaviour, with relatively high speed (up to 70mm/s), force (from 0.2N to 20N) and low consum ption (down to 700mW). The paper proposes experimental results obtained with a new miniature version of the SPA, so called SPA30uXS. Speed aspec ts, force and consumption are considered as well as non -magnetic compatibility for medical MRI application s. A comparison with other tiny piezo motors is also pro posed, in order to give the reader the opportunity to settle the proposed actuator within the realm of possibility. The Squiggle SQL-RV-1.8, from Newscale Technology a nd the P563, from Physik Instruments are considered.