This article presents the development of an actuator
for micro electrical discharge machining (iEDM). A
lineal micropositioner was developed using a solenoidflexural
element architecture and an open-loop control
configuration. The open-loop control system uses a
personal computer (PC) connected to a microcontroller
through an interface developed on language C and
linked to the RS232 protocol. The system varies the
force delivered by the solenoid using the technique of
pulse width modulation (PWM). The capabilities of the
actuator were evaluated by displacing a 1 kg mass over
a 30im lenght. The position of the micropositioner
was measured using a linear variable differential
transformer (LVDT) with a resolution of 0.5im.
Experimental data was collected by a data acquisition
system developed in LabView. The results show that
the actuator is capable of archiving accuracies that fall
within the limits of uncertainty of the measuring system.
A Design of Experiments (DoE) was used to evaluate
the micropositioner performance. The displacement
behavior of the actuator presents hysteresis due its
electromagnetic constitution. The impact of each of
the control parameters on the hysteresis behavior of the
actuator was evaluated. An optimal control parameter
combination that reduces hysteresis and magnifies
displacement range is proposed.
[1]
Hans H. Gatzen,et al.
Thinfilm technologies to fabricate a linear microactuator
,
2001
.
[2]
T. C. Hsia,et al.
A microfabricated electromagnetic linear synchronous motor
,
2005
.
[3]
Thomas R. Kurfess,et al.
International Assessment of Research and Development in Micromanufacturing
,
2005
.
[4]
Ernst Kussul,et al.
Development of low-cost microequipment
,
2002,
Proceedings of 2002 International Symposium on Micromechatronics and Human Science.
[5]
Oriol Gomis-Bellmunt,et al.
Linear electromagnetic actuator modeling for optimization of mechatronic and adaptronic systems
,
2007
.
[6]
Shang-Teh Wu,et al.
An LVDT-based self-actuating displacement transducer
,
2008
.
[7]
S. Jang,et al.
Dynamic Performance of Tubular Linear Actuator with Halbach Array and Mechanical Spring Driven by PWM Inverter
,
2006,
INTERMAG 2006 - IEEE International Magnetics Conference.
[8]
Jaehwan Kim,et al.
Magnetostrictive self-moving cell linear motor
,
2003
.
[9]
Tien-Fu Lu,et al.
A three-DOF compliant micromotion stage with flexure hinges
,
2004,
Ind. Robot.